Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
US7770279B2 · kind B2 · utility
6Cited by
4References
8Claims
0Family size
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Key dates
| Filing date | Feb 5, 2008 |
| Grant date | Aug 10, 2010 |
| Priority date | — |
| Expiry date | May 6, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A micro-machined ultrasonic transducer substrate for immersion operation is formed by a particular arrangement of a plurality of micro-machined membranes that are supported on a silicon substrate. The membranes, together with the substrate, form surface microcavities that are vacuum sealed to provide electrostatic cells. The cells can operate at high frequency and can cover a broader bandwidth in comparison with conventional piezoelectric bulk transducers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.