Chemical storage device with integrated load cell
US7770448B2 · kind B2 · utility
4Cited by
15References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2006 |
| Grant date | Aug 10, 2010 |
| Priority date | — |
| Expiry date | Nov 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01G17/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.