Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
US7771153B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2007 |
| Grant date | Aug 10, 2010 |
| Priority date | — |
| Expiry date | Jan 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route running adjacent to the stocker, allowing the vehicle to access a WIP part directly from a storage bin. At least one storage bin includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the vehicle. The storage unit is partially open to allow the movable shelf to move to the second position, allowing the hoist to access a material unit directly from the shelf for subsequent transport along the track.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.