Patent · US Active

Apparatus and method for determining trench parameters

US7773232B2 · kind B2 · utility

2Cited by

2References

31Claims

0Family size

Assignee

Qimonda AG · DE

Inventors

Peter Weidner · Soest, DE
Alexander Kasic · Dresden, DE
Elke Gehring · Ochtrup, DE

Key dates

Filing date	May 30, 2007
Grant date	Aug 10, 2010
Priority date	—
Expiry date	Aug 4, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/274
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus includes an evaluating unit and a peak detection unit. The peak detection unit is configured to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise trench structures. The evaluation unit is configured to determine from the at least one peak parameter and from a correction value containing information about an effective refractive index of the sample, a trench parameter of the trench structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.