Elongate vacuum system for coating one or both sides of a flat substrate

US7776192B2 · kind B2 · utility

Assignee

• VON ARDENNE Anlagentechnik GmbH · DE

Inventors

• Wolfgang Erbkamm · Dresden, DE
• Dietmar Schulze · Kandern, DE
• Jens Melcher · Dresden, DE
• Olaf Gawer · Dresden, DE

Key dates

• Filing date: Nov 4, 2004
• Grant date: Aug 17, 2010
• Expiry date: Feb 14, 2027

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/568
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An elongate vacuum system for coating one or both sides of a flat substrate which can be displaced by the system, comprises at least one magnetron provided with a magnetron surrounding area and is subdivided into successive compartments in the direction of transportation of the substrate by separating walls having closeable suction openings. The compartments can be evacuated either directly by a vacuum connection provided on the compartment or indirectly via a suction opening in the separating wall. At least one compartment comprises an upper partial compartment which is arranged above the substrate. The partial compartment comprises a closeable upper opening in at least one of the outer walls thereof. The aim is to produce an elongate coating system which is flexible to use according to the requirements of various one and two-sided coating processes and ensures a stable, differential and process-optimized sputter atmosphere. At least in one of the upper partial compartments, horizontal and/or vertical elements can be mounted in order to subdivide the upper partial compartment into several sections.