Electrode tuning method and apparatus for a layered heater structure
US7777160B2 · kind B2 · utility
2Cited by
16References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2007 |
| Grant date | Aug 17, 2010 |
| Priority date | — |
| Expiry date | Oct 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/143
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A layered heater structure including an electrode layer and a localized tuning method for tuning the electrode layer of a layered heater structure with high precision is provided. The localized tuning method tunes the electrode layer to its proper local resistance to minimize temperature offsets on the heater surface and thus provide a desired thermal profile that is in marked contrast to conventional, non-localized resistance tuning approaches based on thickness trimming practices, such as grinding or blasting, or resistivity adjustment, such as local heat treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.