Monolithic semiconductor microwave switch array
US7777286B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2007 |
| Grant date | Aug 17, 2010 |
| Priority date | — |
| Expiry date | Nov 18, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/85
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A microwave switch array includes a plurality of microwave slotlines, each of which is controlled by a semiconductor switch including a first PIN junction formed by a primary P-type electrode and a primary N-type electrode separated by the slotline. The switches inject a plasma into the slotline in response to a potential applied across the first PIN junction. Each of the switches includes a second PIN junction between the primary P-type electrode and a secondary N-type electrode, and a third PIN junction between the primary N-type electrode and a secondary P-type electrode. Metal contacts connect the primary P-type electrode and the secondary N-type electrode across second PIN junction, and the primary N-type electrode and the secondary P-type electrode across the third PIN junction. The secondary electrodes extract plasma that diffuses away from the first PIN junction, thereby minimizing the performance degrading effects of plasma diffusion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.