Ultrasonic transducer and manufacturing method thereof
US7778113B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 4, 2007 |
| Grant date | Aug 17, 2010 |
| Priority date | — |
| Expiry date | Dec 2, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A technology capable of improving receiver sensitivity and improving insulation withstand voltage in an ultrasonic transducer is provided. An ultrasonic transducer comprises: a lower electrode; an insulator covering the lower electrode; a cavity portion disposed on the insulator so as to overlap with the lower electrode; and an upper electrode disposed so as to overlap with the cavity portion. In this ultrasonic transducer, an insulator is inserted between the upper and lower electrodes in a part not having the cavity portion. By this means, sum total of thickness of insulators between the upper and lower electrodes in a part not having the cavity portion is larger than sum total of thickness of insulators between the upper and lower electrodes in a part having the cavity portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.