Oscillating scanning probe with constant contact force
US7779553B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2008 |
| Grant date | Aug 24, 2010 |
| Priority date | — |
| Expiry date | Jul 16, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for scanning a surface of a workpiece using a scanning probe 2 mounted on a support 3 on a coordinate measuring machine 4. The support contains drive means 5, 7 for actuating the movement of the scanning probe 2 relatively to the support 3. The method further involves detecting means 9 to measure a contact force F applied between the tip 10 of the probe and the surface 1, control means 13 coupled to the drive means, and memory means 14 for storing theoretical profiles 19 and coordinates 20 of the surface. This method is characterized by the fact that the control means 13 adjust the actuation of the drive means 5, 7 along a scanning path 18 in order to maintain the contact force 11 within the defined range of values 15 during the whole scanning operation along the scanning path 18.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.