Patent · US Expired

Multi-chamber processing with simultaneous workpiece transport and gas delivery

US7780821B2 · kind B2 · utility

2Cited by
20References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 2, 2004
Grant dateAug 24, 2010
Priority date—
Expiry dateNov 9, 2025

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C14/568
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A method for treating/processing substrates/workpieces in a multi-chamber treatment/processing apparatus, comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.