Fabrication method of micro-lens and fabrication method of master for micro-lens
US7781155B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Dec 28, 2007 |
| Grant date | Aug 24, 2010 |
| Priority date | — |
| Expiry date | Apr 22, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70416
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of fabricating a micro lens, the method including: forming a photo-sensitive film on a substrate; placing a photo mask at a predetermined distance from a top of the photo-sensitive film; exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses; and developing the photo-sensitive film such that the exposed three-dimensional structures remain. Also, there is provided a method of fabricating a master for a micro lens, in which a master material is applied on the photo-sensitive film with the three-dimensional structures to form a master having the three-dimensional structures transferred thereonto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.