Microengineered vacuum interface for an ionization system
US7786434B2 · kind B2 · utility
24Cited by
16References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2007 |
| Grant date | Aug 31, 2010 |
| Priority date | — |
| Expiry date | Feb 9, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T408/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a planar component for interfacing an atmospheric pressure ionizer to a vacuum system. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.