Method for manufacturing piezoelectric ink-jet printhead
US7789493B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2006 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Mar 22, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14475
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.