Micro structure for sensing trace chemicals
US7790469B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2007 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Feb 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method to fabricate an optical scattering probe and the method includes the steps of a) depositing an conductive layer on a substrate followed by depositing a noble metal layer on top of the conductive layer and then an aluminum layer on top the noble metal layer; b) anodizing the aluminum layer to form a porous aluminum oxide layer having a plurality of pores; and c) etching the plurality of pores through the aluminum oxide layer and the noble metal layer for forming a nano-hole array. In a preferred embodiment, the step of etching the plurality of pores through the aluminum oxide layer and the noble metal layer further comprising a step of widening the pores followed by removing the aluminum oxide layer for forming a plurality of noble metal column on top of the conductive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.