Apparatus and method for cleaning glass substrates using a cool hydrogen flame
US7790477B2 · kind B2 · utility
5Cited by
6References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 6, 2009 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Mar 5, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.