Dielectric coatings for electrowetting applications
US7791815B2 · kind B2 · utility
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45Claims
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Key dates
| Filing date | Dec 27, 2007 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Mar 11, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31663
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A dielectric coating is provided which has both a dielectric constant greater than 2.5 and a hydrophobic surface. The dielectric coating may be provided by plasma enhanced chemical vapor deposition (PECVD) of organosilane, organosiloxane, organosilazane, organometallic, and/or hydrocarbon precursors. Methods are also provided for altering the contact angle of a liquid in contact with the dielectric coating, e.g., for electrowetting applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.