Method of making a plurality of flow sensors
US7793410B2 · kind B2 · utility
15Cited by
69References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2007 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | Sep 19, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49798
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of making a plurality of flow sensors is provided, each flow sensor having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.