Gas pressure sensor
US7793534B2 · kind B2 · utility
3Cited by
9References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 29, 2005 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | Dec 20, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A selective gas sensor is for determining the presence of a test gas, for example, helium includes an evacuated housing, sealed by a selectively gas-permeable membrane. The membrane is part of a sight glass, whereby the glass pane is provided with a hole, sealed by the membrane made from a silicon material. The frame of the membrane wall is connected to the housing by means of a high-vacuum soft-metal seal. The housing can also form one of the electrodes of the gas pressure sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.