Method for the recovery and re-use of process gases
US7794523B2 · kind B2 · utility
4Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 2006 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | Dec 11, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.