Chemically amplified positive resist composition
US7794914B2 · kind B2 · utility
4Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2007 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | Apr 11, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a chemically amplified resist composition comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.