Patent · US Active

Cold cathode pressure sensor

US7795876B2 · kind B2 · utility

3Cited by

13References

20Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Daniel Wetzig · Cologne, DE
Ludolf Gerdau · Cologne, DE

Key dates

Filing date	Mar 2, 2006
Grant date	Sep 14, 2010
Priority date	—
Expiry date	Apr 26, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J41/06
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.