System, method and apparatus for a micromachined interferometer using optical splitting
US7796267B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2007 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | May 21, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined interferometer is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two interfering beams, each propagating in a different medium. A fixed mirror embedded in one of the mediums reflects one of the interfering beams back towards the half plane beam splitter through such medium, while a moveable mirror, which is controlled by an actuator, reflects the other interfering beam back towards said half plane beam splitter through the other medium. A detection plane detects an interference pattern produced as a result of interference between the reflected interfering beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.