Patent · US Active

Irregularly shaped actuator fingers for a micro-electromechanical system fabry-perot filter

US7796269B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Morpho Detection, LLC · US

Inventors

Anis Zribi · Colorado Springs, US
Glenn Scott Claydon · Wynantskill, US
Long Que · Rexford, US
Stacey Joy Kennerly · Niskayuna, US
Shankar Chandrasekaran · Viralimalai, IN
Shivappa Goravar · Bengaluru, IN
David Cecil Hays · Niskayuna, US
Ayan Banerjee · Fremont, US

Key dates

Filing date	Aug 10, 2006
Grant date	Sep 14, 2010
Priority date	—
Expiry date	Jun 13, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B26/001
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.