Plasma booster for plasma treatment installation
US7798097B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2006 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Dec 25, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32018
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An arrangement for boosting or igniting a glow discharge plasma for coating workpieces has at least one hollow body of an electrically conductive material formed such that when an electric signal is applied to the hollow body at least in a certain pressure and voltage range, the geometric conditions for the ignition of a discharge in the interior of the hollow body are satisfied. The hollow body has at least one opening through which charge carriers can flow off into the environs of the arrangement in order to ignite and operate the plasma or to boost a plasma existing there. The arrangement has a mechanism which connects the hollow body electrically with the workpieces such that the hollow body is essentially at workpiece potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.