Ceramic member and corrosion-resisting member
US7799719B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2008 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Sep 20, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/95
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A ceramic member having a high density, small grain diameter, and excellent plasma resistance is provided. The ceramic member is constituted of a fine structure composed of fine grains, which is a ceramic member comprising an yttria as a main component and obtained through firing, wherein the ceramic member has an open porosity, as determined through a measurement by the Archimedes method, of less than 0.5%. By diminishing open voids, sites which is an origin of plasma erosion can be diminished. Thus, a ceramic member having excellent plasma resistance can be provided. By inhibiting abnormal grain growth to form a ceramic member constituted of stall grains, particle contamination by dusting can be reduced. Thus, plasma resistance and preventing particulate contamination can be improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.