Stabilized, non-aqueous cleaning compositions for microelectronics substrates
US7799749B2 · kind B2 · utility
2Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 31, 2007 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Aug 16, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Non-aqueous stripping and cleaning compositions for cleaning microelectronics devices, the composition having a least one organic sulfur-containing polar compound as a stripping solvent, at least one water-free source of a strong hydroxide base, and at least one hydroxypyridine stabilizing agent to inhibit detrimental side reactions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.