Patent · US Active

Microelectronic multiple electron beam emitting device

US7800085B2 · kind B2 · utility

0Cited by

9References

23Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Pierre Nicolas · Tourny, FR
Yohan Desieres · Le Pont-de-Claix, FR

Key dates

Filing date	Jan 24, 2006
Grant date	Sep 21, 2010
Priority date	—
Expiry date	Feb 9, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31774
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electronic emission device emitting plural beams of electrons and including a first structure of a plurality of electron beam emission micro-sources, and a second structure opposite the first structure for collecting electrons emitted by the first structure and for carrying out a secondary emission following the collection. The device can be applied in particular to the field of direct writing lithography.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.