Method and device for measuring ultrahigh vacuum
US7800376B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2005 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Mar 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a device for measuring ultrahigh vacuum are disclosed. The method includes providing a vacuum cold cathode pressure gauge and varying a voltage on an anode of the pressure cell with pressure in such a way that an ion current flow is maintained substantially at its maximum value at all times. A voltage-controlled source either (1) preliminarily scans a whole voltage range, for example, between 1 kV and 12 kV, in a relatively short time, and subsequently sets the source to the voltage, at which the current is substantially at its maximum value or (2) based on a calibration of the gauge, sets the voltage, for a given pressure, to the value that has been previously stored as substantially optimal. The device operates at a voltage that varies with pressure in such a way that the ion current is maintained substantially at its maximum value at all times. The device is characterized in that an anode of the pressure gauge cell is connected to a voltage-controlled source capable of providing a varying voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.