Method and apparatus for analyzing coatings on curved surfaces
US7800756B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2008 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Mar 26, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9515
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ellipsometer is used to analyze each of a plurality of sample portions that each include a substrate portion with a coating portion thereon, the substrate portions corresponding to respective spaced portions of a part with a curved surface. For each sample portion, the analysis includes: directing onto the coating portion a beam of radiation that includes first and second components with different polarizations; detecting energy of each of the first and second components reflected by the sample portion; and generating data that includes, for each of a plurality of different wavelengths, information regarding a change caused by the sample portion to a relationship between the first and second components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.