Method and device for detecting leaks

US7802461B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Jörn Liebich · Cologne, DE
• Randolf Rolff · Horrem, DE
• Ralf Kilian

Key dates

• Filing date: Aug 24, 2005
• Grant date: Sep 28, 2010
• Expiry date: Nov 7, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/202
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In leak detection, the signal generated by a test gas is superposed by interferences which fade as the vacuum generation in a container proceeds. Depending on the negative slope of the volume signal (MS), a lower indication limit (AG) is calculated. Upon activation of a zero function, the volume signal (MS) is not reduced to zero but only to the level of the indication limit (AG). Any exceeding of the indication limit is identified as a leak. Thus, the maximum sensitivity of the leak detection is guaranteed at any time.