Radiation sensor with cap and optical elements
US7807972B2 · kind B2 · utility
3Cited by
30References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2008 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Jun 27, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a sensor including a first sensor element formed in a first substrate and at least one optical element formed in a second substrate, the first and second substrates being configured relative to one another such that the second substrate forms a cap over the first sensor element. The cap includes a diffractive optical element and an aperture stop which collectively determine the wavelength of incident radiation that is allowed through the cap and onto the at least one optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.