Advanced-process-control system utilizing a lambda tuner
US7809459B2 · kind B2 · utility
5Cited by
3References
16Claims
0Family size
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Key dates
| Filing date | Dec 31, 2007 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Mar 27, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B13/041
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.