Device for making monocrystalline or multicrystalline materials, in particular multicrystalline silicon

US7811383B2 · kind B2 · utility

Assignee

• Schott AG · DE

Inventors

• Matthias Mueller · Harsefeld, DE
• Markus Finkbeiner · Remchingen, DE
• Uwe Sahr · Nuremberg, DE
• Ingo Schwirtlich · Miltenberg, DE
• Michael Clauss · Hofheim, DE

Key dates

• Filing date: Apr 9, 2009
• Grant date: Oct 12, 2010
• Expiry date: Apr 9, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T117/1092
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The device for production of a monocrystalline or a multicrystalline material blank, especially a silicon multicrystalline blank, using the VGF method has a crucible with a rectangular or square cross section. A flat heating device, especially a jacket heater, which generates an inhomogeneous temperature profile, is arranged around the crucible. This temperature profile corresponds to the temperature gradient formed in the center of the crucible. The heat output of the flat heating device decreases from the top to the bottom end of the crucible. The flat heating device includes parallel heating webs, which extend in a meandering course. The heat outputs from the heating webs differ according to their different conductor cross sections. To avoid local overheating in corner areas of the crucible, constrictions of the cross sections of the heating webs are provided at inversion zones of their meandering course.