MEMS resonator-based signal modulation
US7812680B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 2006 |
| Grant date | Oct 12, 2010 |
| Priority date | — |
| Expiry date | Oct 26, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03C3/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Disclosed herein are devices and methods for generating a modulated signal with a MEMS resonator, or microresonator. A bias, or polarization, voltage for activating the MEMS resonator is determined by a control signal, or input voltage, indicative of information to be carried by the modulated signal. In some cases, the MEMS resonator may be driven by an oscillator circuit to facilitate operation of the MEMS resonator. The control signal may include an amplitude modulated voltage or a digital data stream such that output signals of the MEMS resonator or oscillator circuit may carry information via frequency modulation, such as frequency shift keying modulation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.