Patent · US Active

Single-pole double-throw MEMS switch

US7816999B2 · kind B2 · utility

1Cited by
38References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2005
Grant dateOct 19, 2010
Priority date—
Expiry dateApr 25, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01H59/0009
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

MEMS switches of varying configurations provide individually acutatable contacts. The MEMS switches are sealed by an improved anodic bonding technique.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.