Scanning optical microscope with long working distance objective
US7817275B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 7, 2008 |
| Grant date | Oct 19, 2010 |
| Priority date | — |
| Expiry date | Oct 16, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0032
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning optical microscope, including: a light source to generate a beam of probe light; collimation optics to substantially collimate the probe beam; a probe-result beamsplitter; a long working-distance, infinity-corrected objective; scanning means to scan a beam spot of the focused probe beam on or within a sample; relay optics; and a detector. The collimation optics are disposed in the probe beam. The probe-result beamsplitter is arranged in the optical paths of the probe beam and the resultant light from the sample. The beamsplitter reflects the probe beam into the objective and transmits resultant light. The long working-distance, infinity-corrected objective is also arranged in the optical paths of the probe beam and the resultant light. It focuses the reflected probe beam onto the sample, and collects and substantially collimates the resultant light. The relay optics are arranged to relay the transmitted resultant light from the beamsplitter to the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.