Leak inspection method and leak inspector
US7818133B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 24, 2007 |
| Grant date | Oct 19, 2010 |
| Priority date | — |
| Expiry date | Jan 3, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/3263
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a calibration mode, an equilibrium period after pressurized gas is sealed in a device under inspection and a reference tank is divided into two periods; pressure-difference changes ΔP1 and ΔP2 are measured when a first-half equilibrium period of duration T1 elapses and when a second-half equilibrium period of duration T1 elapses, respectively; and a pressure-difference change ΔP3 generated in an inspection period of duration T2 is measured. A pressure-difference change CT2 generated for duration T2 from when a period of time in which the influence of an adiabatic change seems to become sufficiently stable elapses is measured. A drift correction coefficient K is calculated from these measured values using K=(ΔP3−CT2)/(ΔP1−ΔP2), is stored in a storage section, and is used in an inspection mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.