Patent · US Expired

Dielectric-layer-coated substrate and installation for production thereof

US7820017B2 · kind B2 · utility

1Cited by
25References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 28, 2004
Grant dateOct 26, 2010
Priority date
Expiry dateJan 22, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2211/446
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

The invention relates to a substrate (1), especially a glass substrate, coated with at least one dielectric thin-film layer deposited by sputtering, especially magnetically enhanced sputtering and preferably reactive sputtering in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) coming from an ion source (4), characterized in that said dielectric layer exposed to the ion beam has a refractive index that can be adjusted according to the parameters of the ion source, said ion source being a linear source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.