Dielectric-layer-coated substrate and installation for production thereof
US7820017B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2004 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Jan 22, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2211/446
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention relates to a substrate (1), especially a glass substrate, coated with at least one dielectric thin-film layer deposited by sputtering, especially magnetically enhanced sputtering and preferably reactive sputtering in the presence of oxygen and/or nitrogen, with exposure to at least one ion beam (3) coming from an ion source (4), characterized in that said dielectric layer exposed to the ion beam has a refractive index that can be adjusted according to the parameters of the ion source, said ion source being a linear source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.