Method for calibrating an electrostatic discharge tester
US7821272B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2008 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Jan 31, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to a method for calibrating transient behaviour of an electrostatic discharge (ESD) test system. The system includes an ESD pulse generator and probe needles for applying a predetermined pulse on a device under test. The probe needles are connected to the ESD pulse generator via conductors. The test system includes measurement equipment for detecting transient behaviour of the device under test by simultaneously capturing voltage and current waveforms the device as a result of the pulse. The method includes the steps of: (a) applying the ESD test system on a first known system with a first known impedance, (b) applying the ESD test system on a second known system with a known second impedance, and (c) determining calibration data for the transient behaviour the ESD test system on the basis of captured voltage and current waveforms, taking into account said known first and second impedances. In preferred embodiments the waveforms are transferred to the frequency domain for correlation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.