Sample traveling stage with flexure mechanism module to absorb the deformation of the slide
US7821632B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 6, 2008 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Mar 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample traveling stage is used for inspection equipment or precision processing equipment for semiconductors or FPDs, (Flat Panel Displays). The sample traveling stage includes a moving part in which a first slide, which is mounted on a base frame and moves along a first guide block, and a second slide, which is mounted on the first slide and moves along a second guide block, is installed in a mutually crossing direction. A traveling part that travels sample through the sample table is installed by a flexure mechanism module formed on the second slide and measures displacement through the X, Y bar mirror installed at the above sample table in a mutually vertical direction. A measuring part includes a laser head, a beam divider, and an interferometer installed at the operating path of the moving part forms the output into a displacement signal by receiving the input beam interference signal reflected by the X, Y bar mirror from receiver. The deformation error of the mirror and sample, including the sample table, decreases because deformation by the slide is not delivered to the sample table, and measuring accuracy improves because the relative distance of the mirror and the sample…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.