Apparatus and method for measuring surface topography of an object
US7821647B2 · kind B2 · utility
2Cited by
13References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2008 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Jan 23, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.