MEMS mirror with rotation amplification and electromagnetic drive
US7821693B1 · kind B1 · utility
1Cited by
3References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 5, 2007 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Sep 19, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0816
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.