MEMS cooling device
US7823403B2 · kind B2 · utility
5Cited by
12References
33Claims
0Family size
Inventor
Key dates
| Filing date | Aug 26, 2006 |
| Grant date | Nov 2, 2010 |
| Priority date | — |
| Expiry date | Mar 30, 2028 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B19/006
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A preferred embodiment of the MEMS cooling device of the invention comprises one or more MEMS micro-channel volumes in communication with one or more MEMS micro-pump assemblies wherein each micro-pump assembly comprises a flexure valve, such as a leaf valve and means to drive a coolant through the channel volumes such as an electrostatic interleaved comb drive structure. A preferred embodiment comprises an inlet micro-pump assembly and an outlet micro-pump assembly but the device may also be fabricated with a single pump mechanism per channel volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.