Pressure sensor
US7823456B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2009 |
| Grant date | Nov 2, 2010 |
| Priority date | — |
| Expiry date | Mar 17, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is provided with a carrier (2), which in an inner region includes a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged. Additionally, at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane. The first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane. The output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.