Composite mechanical transducers and approaches therefor

US7824098B2 · kind B2 · utility

Assignee

• The Board of Trustees of the Leland Stanford Junior University · US

Inventors

• Renata Melamud · Menlo Park, US
• Bongsang Kim · Mountain View, US
• Matthew Hopcroft · San Francisco, US
• Saurabh Chandorkar · Stanford, US
• Manu Agarwal · Cupertino, US
• Thomas Kenny · Redwood City, US

Key dates

• Filing date: Jan 21, 2008
• Grant date: Nov 2, 2010
• Expiry date: Mar 27, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49007
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.