Method and system for improvement of dose correction for particle beam writers
US7824828B2 · kind B2 · utility
25Cited by
15References
47Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2007 |
| Grant date | Nov 2, 2010 |
| Priority date | — |
| Expiry date | Apr 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/143
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method and system for dose correction of a particle beam writer is disclosed. The method and system includes reading a file of writing objects that includes dose intensity, calculating a rate of dose intensity change between adjacent writing objects, selecting a writing object that may need accuracy improvement of dose correction based on the rate of dose intensity change, and improving accuracy of the dose correction of the writing object that is selected and its adjacent objects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.