Method for manufacturing actuator device and liquid ejecting head including actuator device prepared by the method
US7827658B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2007 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Jan 26, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method is provided for manufacturing an actuator device including a substrate, a vibration plate, lower electrode, and a piezoelectric element having a piezoelectric layer, and an upper electrode. The vibration plate is formed by forming an insulating film comprised of a columnar crystalline zirconium layer whose surface has an average crystal grain size of about 20 to 50 nm on one surface the substrate, and then thermally oxidizing the zirconium layer into a columnar crystalline zirconium oxide layer whose surface has an average crystal grain size of about 20 to 50 nm. The zirconium layer shows an XRD pattern having a (002) plane peak with an FWHM of 0.4 or less. The piezoelectric element is formed on the lower electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.