Method of manufacturing an ink jet recording head having piezoelectric element
US7827659B2 · kind B2 · utility
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29References
8Claims
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Key dates
| Filing date | Aug 24, 2007 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Sep 29, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.