Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method
US7827864B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2008 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Nov 1, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical gyroscope having a microstructure with a first mass, which can oscillate according to a first axis, and a second mass constrained to the first mass so as to oscillate according to a second axis in response to a rotation of the microstructure, and a driving device coupled to the microstructure to maintain the first mass in oscillation at a resonance frequency, the driving device provided with a low-pass filter having a passband such that the resonance frequency is in the passband and a disturbance frequency associated with disturbance signals due to coupling between the first mass and the second mass is not in the passband.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.