Method and apparatus for depositing particles
US7829141B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2008 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | Aug 28, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A supporting method for supporting a metal particle including at least two elements on a surface of a plurality of granular supports in a decompression device, the supporting method supporting the metal particle whose particle diameter being smaller than a grain size of the granular support comprises holding the plurality of granular supports in a container and rotating a stirring device and/or the container, a stirring period in which the relative position among the plurality of granular supports are changed and a non-stirring period in which the relative position among the plurality of granular supports are not changed being altered by the rotating, wherein the decompression device comprises, an evaporation source for evaporating elements to form an alloy particle, the container for holding the plurality of granular supports in the decompression device so that a relative position among granular supports is able to be changed, a rotating device for rotating the container and the stirring device disposed in the container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.